As for the DCMS process, the power supply for the cathode is supplied directly by DC power supply. However, in HiPIMS mode, the high pulsed powering concept was applied in the processing system. There is a power unit which contains DC power supply to charging the pulsing unit. The high energy stored in the pulsing unit is transferred to the cathode in low frequency and short pulse [CAM18]. Under those these circumstances, the HiPIMS mode is generated by high peak power. But still, the average power of HiPIMS is approximately similar to DCMS average power. Thus, the cathode is protected from damage such as overheating during the process [PIL14].